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Design and Implementation of Actuating Cantilever for Pyroelectric Energy Conversion in MEMS

P. Keerthana, T. Malathi, S. Mounika, R. Suresh Kumar, Dr. N. J. R. Muniraj

Abstract


MEMS is a new technology that can be defined as miniaturized mechanical and electromechanical elements that are made using the techniques of micro fabrication. MEMS has found vast applications in the field of aerospace, medical and various engineering applications. MEMS technology offers many advantages in terms of efficiency and durability over the other conventional energy conversion techniques. Harvesting waste energy from environmental resources such as light, wind, and heat converting it into electrical form by using pyroelectric energy conversion technique. In this paper, a bimorph cantilever with PVDF (polyvinylidine fluoride) as pyroelectric material is used to convert thermal energy into electrical energy. Using COMSOL Multiphysics software MEMS device for pyroelectric energy conversion is designed.


Keywords


Pyroelectric Effect, Bimorph Cantilever, MEMS, COMSOL Multiphysics, MATLAB.

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