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Study on Sensitivity Enhancement of Circular Shaped MEMS Cantilevers Using COMSOL Multiphysics
Abstract
Arrival of Micro-Electro Mechanical System (MEMS) in the last decade has been immense and ever growing. MEMS are an expanding and fast growing technology with an extensive range of applications. Micro cantilevers belong to MEMS set of devices and are often used for detection of forces in Micromechanical Sensors. The mass loading of bio-molecules on rectangular micro cantilever beam surface gives small deflection at its free end and poor sensitivity corresponding to the lower concentration of analyte. This paper gives the relative study of a single and double leg circular shaped cantilever based mass sensor in micrograms range. The principle of the paper is to propose a most suitable geometry of circular shaped cantilevers which will have a better sensitivity when compared to rectangular cantilever operating in static mode using COMSOL Multiphysics software.
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